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Surface profilometer "Bruker Dektak XT"

  • surface profiling with stylus technique
  • 0.03-15 mg stylus force
  • height measurement with nanometer resolution
  • vertical range of up to 1 mm
  • sample size up to 200 mm wafer, pieces
  • sample stage x, y, R-theta motorized
  • scan length up to 50 mm
  • 3D analysis