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4-point probe station for C-V und I-V measurements "Suss / Keithley"

Suss EP 4 four-point probe station combined with Keithley 4200-SCS  semiconductor characterization system

  • interactive DC device characterization, real-time plotting, and analysis with high precision sub-femtoamp resolution.
  • device and wafer testing with combined I-V and C-V measurements, e.g. 4-point probe van der Pauw resistivity measurements