Nano Structuring Center

Spectroscopic ellipsometer "HORIBA Jobin Yvon UVISEL-NIR"

  • spectral range: 190-2000 nm (0.62 - 6.53 eV)
  • multi-wavelength unit
  • principal of measurement: photoelastic modulator, frequency: 50 kHz
  • automated goniometer
  • motorized x-y stage (mapping option up to 200 mm wafer)
  • micro spot (50 µm) option
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