Spectroscopic ellipsometer "HORIBA Jobin Yvon UVISEL-NIR"
- spectral range: 190-2000 nm (0.62 - 6.53 eV)
- multi-wavelength unit
- principal of measurement: photoelastic modulator, frequency: 50 kHz
- automated goniometer
- motorized x-y stage (mapping option up to 200 mm wafer)
- micro spot (50 µm) option