Equipment and Technologies
Dualbeam system FIB/SEM
- FEI Helios Nanolab 650
- ZeroK Cs-FIB
Electron beam lithography
- Raith e_LiNE
- Raith Voyager
Photolithography:
Processing:
- electron beam evaporator
- sputter deposition
- electron cyclotron reactive ion etcher (ECR-RIE)
- ion beam etcher (RIBE)
- dicing saw
- oxidation oven
- plasma asher
- substrate bonder
- wire bonder
- drying oven
- vacuum oven
- high vacuum coater
- sample surfce cleaning system
- cross section polisher
Analytics:
- profilometer
- spectroscopic ellipsometer
- 4-point probe station
- microspectrometer
- optical microscopes
- energy-dispersive X-ray spectroscopy
- electron microscope
- atomic force microscope