4-point probe station for C-V und I-V measurements "Suss / Keithley"
Suss EP 4 four-point probe station combined with Keithley 4200-SCS semiconductor characterization system
- interactive DC device characterization, real-time plotting, and analysis with high precision sub-femtoamp resolution.
- device and wafer testing with combined I-V and C-V measurements, e.g. 4-point probe van der Pauw resistivity measurements