Nano Structuring Center

Energy-Dispersive X-Ray Spectroscopy (EDS)

Three different EDS systems are available



  • "QUANTAX"-System from Bruker
  • LN2-free detector "XFlash® 3001"
  • EDS-Mapping of surfaces


  • "Aztec"-System from Oxford Instruments
  • 10 mm2 "X-MaxN" detector
  • "INCA" and "AZtec" EDS Analyse Software
  • EDS-Mapping of surfaces


  • "NARON System 7" from Thermo Scientific
  • LN2-free detector "UltraDry X-ray" detector
  • EDS-Mapping of surfaces


Images of the Systems and screenshot of the EDX software

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