Nano Structuring Center

High Vacuum Coater “Leica EM ACE600”

  • Deposition of different materials for the preparation of scanning electron microscopy samples
  • 1 sputter source with Iridium target for topographic measurements
  • 1 carbon thread evaporation for topographic and EDS measurements
  • Motorized stage: sample rotation, translation and tiliting
  • Integrated quartz crystal microbalance for layer thickness measurement
  • Deposition rate < 1 nm
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