High Vacuum Coater “Leica EM ACE600”
- Deposition of different materials for the preparation of scanning electron microscopy samples
- 1 sputter source with Iridium target for topographic measurements
- 1 carbon thread evaporation for topographic and EDS measurements
- Motorized stage: sample rotation, translation and tiliting
- Integrated quartz crystal microbalance for layer thickness measurement
- Deposition rate < 1 nm