Nano Structuring Center

Scannig Electron Microscope "Hitachi SU8000" with EDS

  • ultrahigh resolution SEM with a resolution of < 1.3 nm at 1 kV
  •  cold field emitter with a probe current from 1 pA to > 5 nA
  • 'triple' electron detector system (lower/upper/top) for the detecion of secondary as well as backscattered electrons
  • STEM detector with brightfield/darkfield aperture
  • EDS-system NS7 from Thermo Scientific for chemical analysis
  • stage and load lock for up to 6" samples
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