Scannig Electron Microscope "Hitachi SU8000" with EDS
- ultrahigh resolution SEM with a resolution of < 1.3 nm at 1 kV
- cold field emitter with a probe current from 1 pA to > 5 nA
- 'triple' electron detector system (lower/upper/top) for the detecion of secondary as well as backscattered electrons
- STEM detector with brightfield/darkfield aperture
- EDS-system NS7 from Thermo Scientific for chemical analysis
- stage and load lock for up to 6" samples