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Nano Structuring Center
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Nano Structuring Center
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Equipment
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Dualbeam system FIB/SEM
FEI Helios Nanolab 650
Electron Beam Lithography
Photolithography
Mask Aligner
Spray Coater
Spin Coater
HMDS Oven
Processing
Electron Beam Evaporator
Sputter Deposition
Plasma Etching
Ion Beam Etching
Dicing Saw
Oxidation Furnace
Plasma Asher
Substrate Bonder
Wire Bonder
Convection Oven
Vacuum Oven
High Vacuum Coater
Sample Surface Cleaning System
Cross section polisher
Analytics
Stylus Profilometer
Spectroscopic Ellipsometer
Four Point Probe Station
Microspectrometer
Optical Microscopes
Energy-dispersive X-ray Spectroscopy (EDX)
Scanning Electron Microscope
Atromic force microscope
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Nano Structuring Center
NSC
Equipment
Processing
Electron Beam Evaporator
Electron beam evaporator "Pfeiffer Classic 500 L"
materials: Al, Ag, Au, Ti, Cr, Cu, SiO
2
, others on request
optional: Ar-plasma pre-treatment
optional: heating of substrate with quartz heaters
optional: ion beam assisted evaporation
