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Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.
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Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.
Nano Structuring Center
  • Staff
  • Equipment
    • Equipment
    • Equipment
    • Dualbeam system FIB/SEM
      • FEI Helios Nanolab 650
    • Electron Beam Lithography
    • Photolithography
      • Mask Aligner
      • Spray Coater
      • Spin Coater
      • HMDS Oven
    • Processing
      • Electron Beam Evaporator
      • Sputter Deposition
      • Plasma Etching
      • Ion Beam Etching
      • Dicing Saw
      • Oxidation Furnace
      • Plasma Asher
      • Substrate Bonder
      • Wire Bonder
      • Convection Oven
      • Vacuum Oven
      • High Vacuum Coater
      • Sample Surface Cleaning System
      • Cross section polisher
    • Analytics
      • Stylus Profilometer
      • Spectroscopic Ellipsometer
      • Four Point Probe Station
      • Microspectrometer
      • Optical Microscopes
      • Energy-dispersive X-ray Spectroscopy (EDX)
      • Scanning Electron Microscope
      • Atromic force microscope
  • Publications
    • Publications
    • Publications
    • 2020
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    • 2006-2010
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Nano Structuring Center
  1. NSC
  2. Equipment
  3. Processing
Electron Beam Evaporator
Sputter Deposition
Plasma Etching
Ion Beam Etching
Dicing Saw
Oxidation Furnace
Plasma Asher
Substrate Bonder
Wire Bonder
Convection Oven
Vacuum Oven
High Vacuum Coater
Sample Surface Cleaning System
Cross section polisher
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Last modified: 11. December 2024
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