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Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.
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Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.Logo of the University of Kaiserslautern-Landau in the form of the 4 letters RPTU. The U is divided into two parts at the bottom.
Nano Structuring Center
  • Staff
  • Equipment
    • Equipment
    • Equipment
    • Dualbeam system FIB/SEM
      • FEI Helios Nanolab 650
    • Electron Beam Lithography
    • Photolithography
      • Mask Aligner
      • Spray Coater
      • Spin Coater
      • HMDS Oven
    • Processing
      • Electron Beam Evaporator
      • Sputter Deposition
      • Plasma Etching
      • Ion Beam Etching
      • Dicing Saw
      • Oxidation Furnace
      • Plasma Asher
      • Substrate Bonder
      • Wire Bonder
      • Convection Oven
      • Vacuum Oven
      • High Vacuum Coater
      • Sample Surface Cleaning System
      • Cross section polisher
    • Analytics
      • Stylus Profilometer
      • Spectroscopic Ellipsometer
      • Four Point Probe Station
      • Microspectrometer
      • Optical Microscopes
      • Energy-dispersive X-ray Spectroscopy (EDX)
      • Scanning Electron Microscope
      • Atromic force microscope
  • Publications
    • Publications
    • Publications
    • 2020
    • 2019
    • 2018
    • 2017
    • 2016
    • 2015
    • 2014
    • 2013
    • 2012
    • 2011
    • 2006-2010
  • Address
  • Links
Nano Structuring Center
  1. NSC
  2. Publications
2020
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2019
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2018
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2017
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2016
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2015
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2014
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2013
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2012
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2011
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2006-2010
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Last modified: 11. December 2024
Pathfinder-ID: nsc-288Click to copy
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